JPH036915Y2 - - Google Patents
Info
- Publication number
- JPH036915Y2 JPH036915Y2 JP1986032763U JP3276386U JPH036915Y2 JP H036915 Y2 JPH036915 Y2 JP H036915Y2 JP 1986032763 U JP1986032763 U JP 1986032763U JP 3276386 U JP3276386 U JP 3276386U JP H036915 Y2 JPH036915 Y2 JP H036915Y2
- Authority
- JP
- Japan
- Prior art keywords
- support frame
- pellicle
- spacer
- circumferential groove
- spacers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 125000006850 spacer group Chemical group 0.000 claims description 33
- 239000000853 adhesive Substances 0.000 claims description 10
- 230000001070 adhesive effect Effects 0.000 claims description 10
- 239000002390 adhesive tape Substances 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 239000000428 dust Substances 0.000 description 15
- 239000000758 substrate Substances 0.000 description 5
- 229920003023 plastic Polymers 0.000 description 4
- 239000004033 plastic Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- -1 polypropylene Polymers 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Natural products C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986032763U JPH036915Y2 (US06811534-20041102-M00003.png) | 1986-03-07 | 1986-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986032763U JPH036915Y2 (US06811534-20041102-M00003.png) | 1986-03-07 | 1986-03-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62143950U JPS62143950U (US06811534-20041102-M00003.png) | 1987-09-10 |
| JPH036915Y2 true JPH036915Y2 (US06811534-20041102-M00003.png) | 1991-02-21 |
Family
ID=30839752
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986032763U Expired JPH036915Y2 (US06811534-20041102-M00003.png) | 1986-03-07 | 1986-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH036915Y2 (US06811534-20041102-M00003.png) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4668724B2 (ja) * | 2005-08-08 | 2011-04-13 | 信越ポリマー株式会社 | ペリクル用収納容器 |
| JP5052106B2 (ja) * | 2006-11-22 | 2012-10-17 | 旭化成イーマテリアルズ株式会社 | ペリクルの収納方法 |
| JP5393298B2 (ja) * | 2009-07-06 | 2014-01-22 | 大日商事株式会社 | マスクケース |
| JP6604651B2 (ja) * | 2016-02-22 | 2019-11-13 | 信越化学工業株式会社 | ペリクル収納容器 |
| JP7442291B2 (ja) * | 2019-10-09 | 2024-03-04 | 信越化学工業株式会社 | ペリクルとその専用ペリクルケースからなるアセンブリ |
-
1986
- 1986-03-07 JP JP1986032763U patent/JPH036915Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62143950U (US06811534-20041102-M00003.png) | 1987-09-10 |
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