JPH0368546B2 - - Google Patents

Info

Publication number
JPH0368546B2
JPH0368546B2 JP61121269A JP12126986A JPH0368546B2 JP H0368546 B2 JPH0368546 B2 JP H0368546B2 JP 61121269 A JP61121269 A JP 61121269A JP 12126986 A JP12126986 A JP 12126986A JP H0368546 B2 JPH0368546 B2 JP H0368546B2
Authority
JP
Japan
Prior art keywords
amorphous silicon
thin film
substrate
silicon thin
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61121269A
Other languages
English (en)
Japanese (ja)
Other versions
JPS621281A (ja
Inventor
Hiroshi Okaniwa
Kenji Nakatani
Mitsuo Asano
Wataru Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teijin Ltd
Original Assignee
Teijin Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teijin Ltd filed Critical Teijin Ltd
Priority to JP61121269A priority Critical patent/JPS621281A/ja
Publication of JPS621281A publication Critical patent/JPS621281A/ja
Publication of JPH0368546B2 publication Critical patent/JPH0368546B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
JP61121269A 1986-05-28 1986-05-28 非晶質シリコン薄膜の製造方法 Granted JPS621281A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61121269A JPS621281A (ja) 1986-05-28 1986-05-28 非晶質シリコン薄膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61121269A JPS621281A (ja) 1986-05-28 1986-05-28 非晶質シリコン薄膜の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP5289380A Division JPS56150874A (en) 1980-04-23 1980-04-23 Method of continuously manufacturing amorphous silicon solar battery

Publications (2)

Publication Number Publication Date
JPS621281A JPS621281A (ja) 1987-01-07
JPH0368546B2 true JPH0368546B2 (enExample) 1991-10-28

Family

ID=14807070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61121269A Granted JPS621281A (ja) 1986-05-28 1986-05-28 非晶質シリコン薄膜の製造方法

Country Status (1)

Country Link
JP (1) JPS621281A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2532123Y2 (ja) * 1991-06-26 1997-04-09 三洋電機株式会社 加湿機
FR2961022B1 (fr) * 2010-06-02 2013-09-27 Centre Nat Rech Scient Cellule photovoltaïque pour application sous flux solaire concentre

Also Published As

Publication number Publication date
JPS621281A (ja) 1987-01-07

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