JPH0366815B2 - - Google Patents

Info

Publication number
JPH0366815B2
JPH0366815B2 JP57165350A JP16535082A JPH0366815B2 JP H0366815 B2 JPH0366815 B2 JP H0366815B2 JP 57165350 A JP57165350 A JP 57165350A JP 16535082 A JP16535082 A JP 16535082A JP H0366815 B2 JPH0366815 B2 JP H0366815B2
Authority
JP
Japan
Prior art keywords
region
contact
insulating film
capacitor
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57165350A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5954257A (ja
Inventor
Makio Iida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Priority to JP57165350A priority Critical patent/JPS5954257A/ja
Publication of JPS5954257A publication Critical patent/JPS5954257A/ja
Publication of JPH0366815B2 publication Critical patent/JPH0366815B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers

Landscapes

  • Bipolar Transistors (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Bipolar Integrated Circuits (AREA)
JP57165350A 1982-09-22 1982-09-22 半導体装置 Granted JPS5954257A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57165350A JPS5954257A (ja) 1982-09-22 1982-09-22 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57165350A JPS5954257A (ja) 1982-09-22 1982-09-22 半導体装置

Publications (2)

Publication Number Publication Date
JPS5954257A JPS5954257A (ja) 1984-03-29
JPH0366815B2 true JPH0366815B2 (en, 2012) 1991-10-18

Family

ID=15810684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57165350A Granted JPS5954257A (ja) 1982-09-22 1982-09-22 半導体装置

Country Status (1)

Country Link
JP (1) JPS5954257A (en, 2012)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61272963A (ja) * 1985-05-28 1986-12-03 Toshiba Corp 半導体装置
JP2740177B2 (ja) * 1988-01-19 1998-04-15 三洋電機株式会社 半導体集積回路
JP2743369B2 (ja) * 1988-03-14 1998-04-22 ソニー株式会社 半導体装置とその製造方法
JPH06105761B2 (ja) * 1988-05-10 1994-12-21 富士電機株式会社 集積回路装置の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5754360A (en) * 1980-09-18 1982-03-31 Nec Corp Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS5954257A (ja) 1984-03-29

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