JPH0364827B2 - - Google Patents

Info

Publication number
JPH0364827B2
JPH0364827B2 JP15142085A JP15142085A JPH0364827B2 JP H0364827 B2 JPH0364827 B2 JP H0364827B2 JP 15142085 A JP15142085 A JP 15142085A JP 15142085 A JP15142085 A JP 15142085A JP H0364827 B2 JPH0364827 B2 JP H0364827B2
Authority
JP
Japan
Prior art keywords
sample plate
light
range
outline
surface inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15142085A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6214039A (ja
Inventor
Mizoo Horai
Masashi Pponda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP15142085A priority Critical patent/JPS6214039A/ja
Publication of JPS6214039A publication Critical patent/JPS6214039A/ja
Publication of JPH0364827B2 publication Critical patent/JPH0364827B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G01N21/9503—Wafer edge inspection

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP15142085A 1985-07-11 1985-07-11 表面検査装置 Granted JPS6214039A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15142085A JPS6214039A (ja) 1985-07-11 1985-07-11 表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15142085A JPS6214039A (ja) 1985-07-11 1985-07-11 表面検査装置

Publications (2)

Publication Number Publication Date
JPS6214039A JPS6214039A (ja) 1987-01-22
JPH0364827B2 true JPH0364827B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-10-08

Family

ID=15518227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15142085A Granted JPS6214039A (ja) 1985-07-11 1985-07-11 表面検査装置

Country Status (1)

Country Link
JP (1) JPS6214039A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4787185B2 (ja) * 2007-02-21 2011-10-05 株式会社トプコン ウエハ表面検査方法及びその装置

Also Published As

Publication number Publication date
JPS6214039A (ja) 1987-01-22

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