JPH0362476B2 - - Google Patents

Info

Publication number
JPH0362476B2
JPH0362476B2 JP56132769A JP13276981A JPH0362476B2 JP H0362476 B2 JPH0362476 B2 JP H0362476B2 JP 56132769 A JP56132769 A JP 56132769A JP 13276981 A JP13276981 A JP 13276981A JP H0362476 B2 JPH0362476 B2 JP H0362476B2
Authority
JP
Japan
Prior art keywords
substrate
nozzle
chemical solution
workpiece
rotated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56132769A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5836679A (ja
Inventor
Tomoaki Tsuboka
Yoshinori Niwada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13276981A priority Critical patent/JPS5836679A/ja
Publication of JPS5836679A publication Critical patent/JPS5836679A/ja
Publication of JPH0362476B2 publication Critical patent/JPH0362476B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP13276981A 1981-08-26 1981-08-26 ウエツト処理方法 Granted JPS5836679A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13276981A JPS5836679A (ja) 1981-08-26 1981-08-26 ウエツト処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13276981A JPS5836679A (ja) 1981-08-26 1981-08-26 ウエツト処理方法

Publications (2)

Publication Number Publication Date
JPS5836679A JPS5836679A (ja) 1983-03-03
JPH0362476B2 true JPH0362476B2 (enrdf_load_stackoverflow) 1991-09-26

Family

ID=15089119

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13276981A Granted JPS5836679A (ja) 1981-08-26 1981-08-26 ウエツト処理方法

Country Status (1)

Country Link
JP (1) JPS5836679A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6449752B2 (ja) * 2014-12-01 2019-01-09 東京エレクトロン株式会社 現像処理方法、コンピュータ記憶媒体及び現像処理装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS541603A (en) * 1977-06-06 1979-01-08 Fujitsu Ltd Coating method of magnetic recording media

Also Published As

Publication number Publication date
JPS5836679A (ja) 1983-03-03

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