JPH0361489B2 - - Google Patents

Info

Publication number
JPH0361489B2
JPH0361489B2 JP59155539A JP15553984A JPH0361489B2 JP H0361489 B2 JPH0361489 B2 JP H0361489B2 JP 59155539 A JP59155539 A JP 59155539A JP 15553984 A JP15553984 A JP 15553984A JP H0361489 B2 JPH0361489 B2 JP H0361489B2
Authority
JP
Japan
Prior art keywords
treatment
exhaust gas
processing
dry etching
agent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59155539A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6135849A (ja
Inventor
Hisayuki Mizuno
Masao Miura
Hiroyuki Fukushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ube Corp
Original Assignee
Ube Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ube Industries Ltd filed Critical Ube Industries Ltd
Priority to JP59155539A priority Critical patent/JPS6135849A/ja
Publication of JPS6135849A publication Critical patent/JPS6135849A/ja
Publication of JPH0361489B2 publication Critical patent/JPH0361489B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Drying Of Semiconductors (AREA)
JP59155539A 1984-07-27 1984-07-27 ドライエツチング排ガス処理剤 Granted JPS6135849A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59155539A JPS6135849A (ja) 1984-07-27 1984-07-27 ドライエツチング排ガス処理剤

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59155539A JPS6135849A (ja) 1984-07-27 1984-07-27 ドライエツチング排ガス処理剤

Publications (2)

Publication Number Publication Date
JPS6135849A JPS6135849A (ja) 1986-02-20
JPH0361489B2 true JPH0361489B2 (enrdf_load_stackoverflow) 1991-09-20

Family

ID=15608268

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59155539A Granted JPS6135849A (ja) 1984-07-27 1984-07-27 ドライエツチング排ガス処理剤

Country Status (1)

Country Link
JP (1) JPS6135849A (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6430626A (en) * 1987-07-28 1989-02-01 Ebara Res Co Ltd Treatment of exhaust gas
JPH04156919A (ja) * 1990-10-19 1992-05-29 Ebara Res Co Ltd ハロゲン系化合物を含有する排ガスの処理方法
WO1998001217A1 (fr) * 1996-07-04 1998-01-15 Dowa Mining Co., Ltd. Procede et equipement de decompositions d'hydrocarbures fluores
JP3593875B2 (ja) * 1997-03-24 2004-11-24 昭和電工株式会社 パーフルオロ化合物の接触分解方法
US6162957A (en) * 1997-03-24 2000-12-19 Showa Denko K.K. Catalytic decomposition of perfluoro-compound
JP4493824B2 (ja) * 2000-09-28 2010-06-30 日本パイオニクス株式会社 有害ガスの浄化方法及び浄化剤
JP5217819B2 (ja) * 2008-09-12 2013-06-19 旭硝子株式会社 ハロゲン系ガスの除去剤およびハロゲン系ガスの除去方法
KR101726299B1 (ko) 2016-05-25 2017-04-12 (주)중앙플랜트 수평형 습식 스크러버용 클린 필터를 포함하는 조립체 및 그의 구성방법
KR102204092B1 (ko) 2019-01-14 2021-01-18 (주)중앙플랜트 수평형 습식 스크러버용 클린 필터의 자동세척장치

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5241193A (en) * 1975-09-29 1977-03-30 Shimizu Constr Co Ltd Treating process of active carbon having not property reducing nitroge n dioxide
JPS5435188A (en) * 1977-08-23 1979-03-15 Seitetsu Kagaku Co Ltd Acidic gas removing method and removing material

Also Published As

Publication number Publication date
JPS6135849A (ja) 1986-02-20

Similar Documents

Publication Publication Date Title
US3876393A (en) Method and article for removing mercury from gases contaminated therewith
EP0001456B1 (en) Process for removing mercury from mercury vapour-containing gases
JPH0361489B2 (enrdf_load_stackoverflow)
JPH07308538A (ja) 有害ガスの浄化剤
JP4488545B2 (ja) フッ化ハロゲンを含む排ガスの処理方法、処理剤及び処理装置
JP3716030B2 (ja) 有害ガスの浄化方法
TWI225467B (en) Vacuum preparation of hydrogen halide drier
KR100481584B1 (ko) 유해물 제거제 및 할로겐함유가스를 무해화하는 방법과 그것의 용도
JP2581642B2 (ja) エッチング排ガス除害剤及び排ガス処理方法
JP4913271B2 (ja) ハロゲンガス用処理剤
EP0764458B1 (en) Cleaning agent and cleaning process for harmful gas
JP2525957B2 (ja) ドライエッチング排ガスの処理剤
JP3260825B2 (ja) 有害ガスの浄化方法
JPH0716583B2 (ja) フッ化塩素を含む排ガスの乾式処理方法
JP3701741B2 (ja) 有害ガスの浄化剤
JPH09234336A (ja) 有害ガスの浄化方法
JPH10235185A (ja) 有害ガスの浄化剤および浄化方法
US5468459A (en) Gas stream treatment method for removing per-fluorocarbons
JP2691927B2 (ja) 有害成分の除去方法
JP3667804B2 (ja) 有害ガスの除害方法
KR100684201B1 (ko) 불소 포함 배기가스의 처리방법 및 이의 방법을 사용하기위한 흡착 컬럼 장치
JPS6331252B2 (enrdf_load_stackoverflow)
JPH057044B2 (enrdf_load_stackoverflow)
JPH06134256A (ja) 有害ガスの浄化方法
JPS62152515A (ja) シラン類の除去方法