JPH0357078B2 - - Google Patents

Info

Publication number
JPH0357078B2
JPH0357078B2 JP61032880A JP3288086A JPH0357078B2 JP H0357078 B2 JPH0357078 B2 JP H0357078B2 JP 61032880 A JP61032880 A JP 61032880A JP 3288086 A JP3288086 A JP 3288086A JP H0357078 B2 JPH0357078 B2 JP H0357078B2
Authority
JP
Japan
Prior art keywords
boat
single crystal
indium
gaas
gallium arsenide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61032880A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62191500A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3288086A priority Critical patent/JPS62191500A/ja
Publication of JPS62191500A publication Critical patent/JPS62191500A/ja
Publication of JPH0357078B2 publication Critical patent/JPH0357078B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP3288086A 1986-02-19 1986-02-19 砒化ガリウム化合物半導体単結晶の製造方法 Granted JPS62191500A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3288086A JPS62191500A (ja) 1986-02-19 1986-02-19 砒化ガリウム化合物半導体単結晶の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3288086A JPS62191500A (ja) 1986-02-19 1986-02-19 砒化ガリウム化合物半導体単結晶の製造方法

Publications (2)

Publication Number Publication Date
JPS62191500A JPS62191500A (ja) 1987-08-21
JPH0357078B2 true JPH0357078B2 (enrdf_load_stackoverflow) 1991-08-30

Family

ID=12371188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3288086A Granted JPS62191500A (ja) 1986-02-19 1986-02-19 砒化ガリウム化合物半導体単結晶の製造方法

Country Status (1)

Country Link
JP (1) JPS62191500A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02229797A (ja) * 1989-03-02 1990-09-12 Hitachi Cable Ltd 低転位密度ガリウム砒素単結晶の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59121195A (ja) * 1982-12-28 1984-07-13 Sumitomo Electric Ind Ltd 半絶縁性砒化ガリウム結晶

Also Published As

Publication number Publication date
JPS62191500A (ja) 1987-08-21

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