JPH0354858B2 - - Google Patents
Info
- Publication number
- JPH0354858B2 JPH0354858B2 JP60238196A JP23819685A JPH0354858B2 JP H0354858 B2 JPH0354858 B2 JP H0354858B2 JP 60238196 A JP60238196 A JP 60238196A JP 23819685 A JP23819685 A JP 23819685A JP H0354858 B2 JPH0354858 B2 JP H0354858B2
- Authority
- JP
- Japan
- Prior art keywords
- push
- die
- needle
- suction nozzle
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
- H10P72/7412—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support the auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support
- H10P72/7414—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support the auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support the auxiliary support including means facilitating the selective separation of some of a plurality of devices from the auxiliary support
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60238196A JPS6298638A (ja) | 1985-10-24 | 1985-10-24 | ダイボンデイング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60238196A JPS6298638A (ja) | 1985-10-24 | 1985-10-24 | ダイボンデイング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6298638A JPS6298638A (ja) | 1987-05-08 |
| JPH0354858B2 true JPH0354858B2 (enFirst) | 1991-08-21 |
Family
ID=17026585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60238196A Granted JPS6298638A (ja) | 1985-10-24 | 1985-10-24 | ダイボンデイング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6298638A (enFirst) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01157548A (ja) * | 1987-12-15 | 1989-06-20 | Shinkawa Ltd | ペレット突き上げ装置 |
| JPH0625963Y2 (ja) * | 1988-07-29 | 1994-07-06 | 松下電器産業株式会社 | 電子部品実装装置 |
| JPH0376139A (ja) * | 1989-08-18 | 1991-04-02 | Nec Corp | 半導体素子突上げ方法 |
| JPH04137043U (ja) * | 1991-06-12 | 1992-12-21 | 山形日本電気株式会社 | 半導体ダイボンデイング装置のダイ突き上げ機構 |
| JP4156460B2 (ja) * | 2003-07-09 | 2008-09-24 | Tdk株式会社 | ワークのピックアップ方法及びその装置、実装機 |
| US7238258B2 (en) * | 2005-04-22 | 2007-07-03 | Stats Chippac Ltd. | System for peeling semiconductor chips from tape |
| WO2009056469A1 (en) * | 2007-10-31 | 2009-05-07 | Oerlikon Assembly Equipment Ag, Steinhausen | Foil perforating needle for detaching a small die from a foil |
| JP5287276B2 (ja) * | 2009-01-15 | 2013-09-11 | Tdk株式会社 | 電子部品のピックアップ方法及びピックアップ装置 |
-
1985
- 1985-10-24 JP JP60238196A patent/JPS6298638A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6298638A (ja) | 1987-05-08 |
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