JPH0354138Y2 - - Google Patents

Info

Publication number
JPH0354138Y2
JPH0354138Y2 JP16725586U JP16725586U JPH0354138Y2 JP H0354138 Y2 JPH0354138 Y2 JP H0354138Y2 JP 16725586 U JP16725586 U JP 16725586U JP 16725586 U JP16725586 U JP 16725586U JP H0354138 Y2 JPH0354138 Y2 JP H0354138Y2
Authority
JP
Japan
Prior art keywords
tank
processing tank
chemical solution
pump
chemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16725586U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6373364U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16725586U priority Critical patent/JPH0354138Y2/ja
Publication of JPS6373364U publication Critical patent/JPS6373364U/ja
Application granted granted Critical
Publication of JPH0354138Y2 publication Critical patent/JPH0354138Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
JP16725586U 1986-10-30 1986-10-30 Expired JPH0354138Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16725586U JPH0354138Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-10-30 1986-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16725586U JPH0354138Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-10-30 1986-10-30

Publications (2)

Publication Number Publication Date
JPS6373364U JPS6373364U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-05-16
JPH0354138Y2 true JPH0354138Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-11-28

Family

ID=31099016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16725586U Expired JPH0354138Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-10-30 1986-10-30

Country Status (1)

Country Link
JP (1) JPH0354138Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3077140B2 (ja) * 1988-09-12 2000-08-14 日本電気株式会社 半導体装置の製造装置
JP2835546B2 (ja) * 1991-10-28 1998-12-14 シャープ株式会社 エッチング等の処理槽

Also Published As

Publication number Publication date
JPS6373364U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-05-16

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