JPH0352408B2 - - Google Patents
Info
- Publication number
- JPH0352408B2 JPH0352408B2 JP8275983A JP8275983A JPH0352408B2 JP H0352408 B2 JPH0352408 B2 JP H0352408B2 JP 8275983 A JP8275983 A JP 8275983A JP 8275983 A JP8275983 A JP 8275983A JP H0352408 B2 JPH0352408 B2 JP H0352408B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- chlorinated silicon
- chlorinated
- raw material
- reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8275983A JPS59207830A (ja) | 1983-05-13 | 1983-05-13 | 塩素化ケイ素の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8275983A JPS59207830A (ja) | 1983-05-13 | 1983-05-13 | 塩素化ケイ素の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59207830A JPS59207830A (ja) | 1984-11-26 |
| JPH0352408B2 true JPH0352408B2 (enrdf_load_stackoverflow) | 1991-08-09 |
Family
ID=13783365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8275983A Granted JPS59207830A (ja) | 1983-05-13 | 1983-05-13 | 塩素化ケイ素の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59207830A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4841083A (en) * | 1987-06-03 | 1989-06-20 | Mitsui Toatsu Chemicals, Incorporated | Ladder polysilanes |
| US7922814B2 (en) * | 2005-11-29 | 2011-04-12 | Chisso Corporation | Production process for high purity polycrystal silicon and production apparatus for the same |
| DE102009056437B4 (de) * | 2009-12-02 | 2013-06-27 | Spawnt Private S.À.R.L. | Verfahren und Vorrichtung zur Herstellung von kurzkettigen halogenierten Polysilanen |
| DE102010062984A1 (de) * | 2010-12-14 | 2012-06-14 | Evonik Degussa Gmbh | Verfahren zur Herstellung höherer Halogen- und Hydridosilane |
-
1983
- 1983-05-13 JP JP8275983A patent/JPS59207830A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59207830A (ja) | 1984-11-26 |
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