JPS59207830A - 塩素化ケイ素の製造方法 - Google Patents

塩素化ケイ素の製造方法

Info

Publication number
JPS59207830A
JPS59207830A JP8275983A JP8275983A JPS59207830A JP S59207830 A JPS59207830 A JP S59207830A JP 8275983 A JP8275983 A JP 8275983A JP 8275983 A JP8275983 A JP 8275983A JP S59207830 A JPS59207830 A JP S59207830A
Authority
JP
Japan
Prior art keywords
silicon
chlorinated silicon
chlorinated
raw material
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8275983A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0352408B2 (enrdf_load_stackoverflow
Inventor
Toshihiro Abe
智弘 安部
Hiroji Miyagawa
博治 宮川
Masayoshi Ito
正義 伊藤
Kenji Iwata
健二 岩田
Toshiyuki Tsukahara
塚原　俊幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP8275983A priority Critical patent/JPS59207830A/ja
Publication of JPS59207830A publication Critical patent/JPS59207830A/ja
Publication of JPH0352408B2 publication Critical patent/JPH0352408B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP8275983A 1983-05-13 1983-05-13 塩素化ケイ素の製造方法 Granted JPS59207830A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8275983A JPS59207830A (ja) 1983-05-13 1983-05-13 塩素化ケイ素の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8275983A JPS59207830A (ja) 1983-05-13 1983-05-13 塩素化ケイ素の製造方法

Publications (2)

Publication Number Publication Date
JPS59207830A true JPS59207830A (ja) 1984-11-26
JPH0352408B2 JPH0352408B2 (enrdf_load_stackoverflow) 1991-08-09

Family

ID=13783365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8275983A Granted JPS59207830A (ja) 1983-05-13 1983-05-13 塩素化ケイ素の製造方法

Country Status (1)

Country Link
JP (1) JPS59207830A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4841083A (en) * 1987-06-03 1989-06-20 Mitsui Toatsu Chemicals, Incorporated Ladder polysilanes
US7922814B2 (en) * 2005-11-29 2011-04-12 Chisso Corporation Production process for high purity polycrystal silicon and production apparatus for the same
JP2013512840A (ja) * 2009-12-02 2013-04-18 シュパウント プライベート ソシエテ ア レスポンサビリテ リミテ 短鎖ハロゲン化ポリシランを製造する方法および装置
JP2014500225A (ja) * 2010-12-14 2014-01-09 エボニック デグサ ゲーエムベーハー 高級ハロゲン化シランおよび高級ヒドリドシランの製造法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4841083A (en) * 1987-06-03 1989-06-20 Mitsui Toatsu Chemicals, Incorporated Ladder polysilanes
US7922814B2 (en) * 2005-11-29 2011-04-12 Chisso Corporation Production process for high purity polycrystal silicon and production apparatus for the same
US8287645B2 (en) 2005-11-29 2012-10-16 Jnc Corporation Production process for high purity polycrystal silicon and production apparatus for the same
JP2013512840A (ja) * 2009-12-02 2013-04-18 シュパウント プライベート ソシエテ ア レスポンサビリテ リミテ 短鎖ハロゲン化ポリシランを製造する方法および装置
US9353227B2 (en) 2009-12-02 2016-05-31 Spawnt Private S.À.R.L. Method and device for producing short-chain halogenated polysilanes
JP2014500225A (ja) * 2010-12-14 2014-01-09 エボニック デグサ ゲーエムベーハー 高級ハロゲン化シランおよび高級ヒドリドシランの製造法

Also Published As

Publication number Publication date
JPH0352408B2 (enrdf_load_stackoverflow) 1991-08-09

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