JPH0351833U - - Google Patents

Info

Publication number

JPH0351833U

JPH0351833U JP11203589U JP11203589U JPH0351833U JP H0351833 U JPH0351833 U JP H0351833U JP 11203589 U JP11203589 U JP 11203589U JP 11203589 U JP11203589 U JP 11203589U JP H0351833 U JPH0351833 U JP H0351833U

Authority

JP

Japan

Prior art keywords

base plate

vapor phase

phase growth

exhaust hole

coil

Prior art date

1989-09-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001947 vapour-phase growth Methods 0.000 claims description 6
• 239000010453 quartz Substances 0.000 claims description 4
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
• 238000010438 heat treatment Methods 0.000 claims description 3
• 239000004065 semiconductor Substances 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• 238000007599 discharging Methods 0.000 claims 1
• 230000006698 induction Effects 0.000 claims 1
• 239000012495 reaction gas Substances 0.000 claims 1
• 230000014759 maintenance of location Effects 0.000 description 2
• 238000010586 diagram Methods 0.000 description 1