JPS61144633U - - Google Patents
Info
- Publication number
- JPS61144633U JPS61144633U JP1985028160U JP2816085U JPS61144633U JP S61144633 U JPS61144633 U JP S61144633U JP 1985028160 U JP1985028160 U JP 1985028160U JP 2816085 U JP2816085 U JP 2816085U JP S61144633 U JPS61144633 U JP S61144633U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- container
- recess
- positioning
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985028160U JPS61144633U (enExample) | 1985-02-27 | 1985-02-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985028160U JPS61144633U (enExample) | 1985-02-27 | 1985-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61144633U true JPS61144633U (enExample) | 1986-09-06 |
Family
ID=30525786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985028160U Pending JPS61144633U (enExample) | 1985-02-27 | 1985-02-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61144633U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0623240U (ja) * | 1992-08-21 | 1994-03-25 | 日新電機株式会社 | 半導体製造装置用サセプター |
| JPH10223546A (ja) * | 1997-02-10 | 1998-08-21 | Toshiba Ceramics Co Ltd | 気相成長用のサセプタ |
-
1985
- 1985-02-27 JP JP1985028160U patent/JPS61144633U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0623240U (ja) * | 1992-08-21 | 1994-03-25 | 日新電機株式会社 | 半導体製造装置用サセプター |
| JPH10223546A (ja) * | 1997-02-10 | 1998-08-21 | Toshiba Ceramics Co Ltd | 気相成長用のサセプタ |