JPH03115669U - - Google Patents

Info

Publication number
JPH03115669U
JPH03115669U JP1990025286U JP2528690U JPH03115669U JP H03115669 U JPH03115669 U JP H03115669U JP 1990025286 U JP1990025286 U JP 1990025286U JP 2528690 U JP2528690 U JP 2528690U JP H03115669 U JPH03115669 U JP H03115669U
Authority
JP
Japan
Prior art keywords
gas blowing
silicon
film
carbon
phase growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1990025286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990025286U priority Critical patent/JPH03115669U/ja
Publication of JPH03115669U publication Critical patent/JPH03115669U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1990025286U 1990-03-13 1990-03-13 Pending JPH03115669U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990025286U JPH03115669U (enExample) 1990-03-13 1990-03-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990025286U JPH03115669U (enExample) 1990-03-13 1990-03-13

Publications (1)

Publication Number Publication Date
JPH03115669U true JPH03115669U (enExample) 1991-11-29

Family

ID=31528223

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990025286U Pending JPH03115669U (enExample) 1990-03-13 1990-03-13

Country Status (1)

Country Link
JP (1) JPH03115669U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005333091A (ja) * 2004-05-21 2005-12-02 Nec Electronics Corp 半導体製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005333091A (ja) * 2004-05-21 2005-12-02 Nec Electronics Corp 半導体製造装置

Similar Documents

Publication Publication Date Title
JP2003524304A (ja) 物体を均一加熱する装置
EP0953659A3 (en) Apparatus for thin film growth
JP3081279B2 (ja) ホットプレート
SE9200555D0 (sv) A method of coating a piezoelectric substrate
JPH11251093A (ja) プラズマ発生用電極
JPH02101528U (enExample)
JPH0272530U (enExample)
JPH0320434U (enExample)
JPS6445767U (enExample)
JPS61147275U (enExample)
JPH01140816U (enExample)
JPS62136566U (enExample)
JPS6430824U (enExample)
JPS62148574U (enExample)
JPS63147814U (enExample)
JPS62126827U (enExample)
JPH07161648A (ja) サセプタ
JPS62190335U (enExample)
JPH01116442U (enExample)
JPH0246868U (enExample)
JPH0529129U (ja) 枚葉式ｃｖｄ装置のサセプタ
JPS62293713A (ja) エピタキシヤル成長装置用サセプタ−
JPH02122072U (enExample)
JPH0353834U (enExample)
JPH0478263U (enExample)