JPH0272530U - - Google Patents
Info
- Publication number
- JPH0272530U JPH0272530U JP1988152752U JP15275288U JPH0272530U JP H0272530 U JPH0272530 U JP H0272530U JP 1988152752 U JP1988152752 U JP 1988152752U JP 15275288 U JP15275288 U JP 15275288U JP H0272530 U JPH0272530 U JP H0272530U
- Authority
- JP
- Japan
- Prior art keywords
- pedestal
- wafer
- pressure plasma
- heating section
- heating part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988152752U JPH0272530U (enExample) | 1988-11-22 | 1988-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988152752U JPH0272530U (enExample) | 1988-11-22 | 1988-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0272530U true JPH0272530U (enExample) | 1990-06-01 |
Family
ID=31427961
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988152752U Pending JPH0272530U (enExample) | 1988-11-22 | 1988-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0272530U (enExample) |
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1988
- 1988-11-22 JP JP1988152752U patent/JPH0272530U/ja active Pending