JPS62136566U - - Google Patents
Info
- Publication number
- JPS62136566U JPS62136566U JP2369886U JP2369886U JPS62136566U JP S62136566 U JPS62136566 U JP S62136566U JP 2369886 U JP2369886 U JP 2369886U JP 2369886 U JP2369886 U JP 2369886U JP S62136566 U JPS62136566 U JP S62136566U
- Authority
- JP
- Japan
- Prior art keywords
- ring
- metal member
- gas supply
- cooling
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000112 cooling gas Substances 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000000110 cooling liquid Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 3
- 238000001816 cooling Methods 0.000 claims 2
- 238000001947 vapour-phase growth Methods 0.000 claims 2
- 239000002826 coolant Substances 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2369886U JPS62136566U (enExample) | 1986-02-20 | 1986-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2369886U JPS62136566U (enExample) | 1986-02-20 | 1986-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62136566U true JPS62136566U (enExample) | 1987-08-28 |
Family
ID=30822240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2369886U Pending JPS62136566U (enExample) | 1986-02-20 | 1986-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62136566U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011035231A (ja) * | 2009-08-04 | 2011-02-17 | Koyo Thermo System Kk | 熱処理装置 |
| KR20250149432A (ko) * | 2024-04-09 | 2025-10-16 | 주식회사 에이치피에스피 | 기판 처리 장치 |
-
1986
- 1986-02-20 JP JP2369886U patent/JPS62136566U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011035231A (ja) * | 2009-08-04 | 2011-02-17 | Koyo Thermo System Kk | 熱処理装置 |
| KR20250149432A (ko) * | 2024-04-09 | 2025-10-16 | 주식회사 에이치피에스피 | 기판 처리 장치 |