JPS62201927U - - Google Patents
Info
- Publication number
- JPS62201927U JPS62201927U JP9028086U JP9028086U JPS62201927U JP S62201927 U JPS62201927 U JP S62201927U JP 9028086 U JP9028086 U JP 9028086U JP 9028086 U JP9028086 U JP 9028086U JP S62201927 U JPS62201927 U JP S62201927U
- Authority
- JP
- Japan
- Prior art keywords
- airtight chamber
- susceptor
- vapor phase
- substrate
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 238000010926 purge Methods 0.000 claims description 2
- 238000001947 vapour-phase growth Methods 0.000 claims 2
- 239000007789 gas Substances 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9028086U JPS62201927U (enExample) | 1986-06-13 | 1986-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9028086U JPS62201927U (enExample) | 1986-06-13 | 1986-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62201927U true JPS62201927U (enExample) | 1987-12-23 |
Family
ID=30949994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9028086U Pending JPS62201927U (enExample) | 1986-06-13 | 1986-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62201927U (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01220433A (ja) * | 1988-02-29 | 1989-09-04 | Nec Corp | 気相成長装置 |
| JPH038426U (enExample) * | 1989-06-09 | 1991-01-28 | ||
| JPH0410528A (ja) * | 1990-04-27 | 1992-01-14 | Shin Etsu Handotai Co Ltd | 気相成長装置および気相成長方法 |
-
1986
- 1986-06-13 JP JP9028086U patent/JPS62201927U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01220433A (ja) * | 1988-02-29 | 1989-09-04 | Nec Corp | 気相成長装置 |
| JPH038426U (enExample) * | 1989-06-09 | 1991-01-28 | ||
| JPH0410528A (ja) * | 1990-04-27 | 1992-01-14 | Shin Etsu Handotai Co Ltd | 気相成長装置および気相成長方法 |