JPS631325U - - Google Patents
Info
- Publication number
- JPS631325U JPS631325U JP1986094051U JP9405186U JPS631325U JP S631325 U JPS631325 U JP S631325U JP 1986094051 U JP1986094051 U JP 1986094051U JP 9405186 U JP9405186 U JP 9405186U JP S631325 U JPS631325 U JP S631325U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- processing apparatus
- wafer processing
- heat treatment
- cooling pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986094051U JPS631325U (enExample) | 1986-06-20 | 1986-06-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986094051U JPS631325U (enExample) | 1986-06-20 | 1986-06-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS631325U true JPS631325U (enExample) | 1988-01-07 |
Family
ID=30957143
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986094051U Pending JPS631325U (enExample) | 1986-06-20 | 1986-06-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS631325U (enExample) |
-
1986
- 1986-06-20 JP JP1986094051U patent/JPS631325U/ja active Pending