JPS62103249U - - Google Patents
Info
- Publication number
- JPS62103249U JPS62103249U JP19435885U JP19435885U JPS62103249U JP S62103249 U JPS62103249 U JP S62103249U JP 19435885 U JP19435885 U JP 19435885U JP 19435885 U JP19435885 U JP 19435885U JP S62103249 U JPS62103249 U JP S62103249U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- dry etching
- substrate
- etched
- close contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001312 dry etching Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000001816 cooling Methods 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19435885U JPS62103249U (enExample) | 1985-12-19 | 1985-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19435885U JPS62103249U (enExample) | 1985-12-19 | 1985-12-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62103249U true JPS62103249U (enExample) | 1987-07-01 |
Family
ID=31151257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19435885U Pending JPS62103249U (enExample) | 1985-12-19 | 1985-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62103249U (enExample) |
-
1985
- 1985-12-19 JP JP19435885U patent/JPS62103249U/ja active Pending
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