JPS61157329U - - Google Patents
Info
- Publication number
- JPS61157329U JPS61157329U JP4105385U JP4105385U JPS61157329U JP S61157329 U JPS61157329 U JP S61157329U JP 4105385 U JP4105385 U JP 4105385U JP 4105385 U JP4105385 U JP 4105385U JP S61157329 U JPS61157329 U JP S61157329U
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- wafers
- vacuum suction
- ferromagnetic
- chromium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4105385U JPS61157329U (enExample) | 1985-03-23 | 1985-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4105385U JPS61157329U (enExample) | 1985-03-23 | 1985-03-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61157329U true JPS61157329U (enExample) | 1986-09-30 |
Family
ID=30550514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4105385U Pending JPS61157329U (enExample) | 1985-03-23 | 1985-03-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61157329U (enExample) |
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1985
- 1985-03-23 JP JP4105385U patent/JPS61157329U/ja active Pending