JPS63124739U - - Google Patents
Info
- Publication number
- JPS63124739U JPS63124739U JP1987015891U JP1589187U JPS63124739U JP S63124739 U JPS63124739 U JP S63124739U JP 1987015891 U JP1987015891 U JP 1987015891U JP 1589187 U JP1589187 U JP 1589187U JP S63124739 U JPS63124739 U JP S63124739U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- heating device
- heat treatment
- treatment apparatus
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987015891U JPS63124739U (enExample) | 1987-02-05 | 1987-02-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987015891U JPS63124739U (enExample) | 1987-02-05 | 1987-02-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63124739U true JPS63124739U (enExample) | 1988-08-15 |
Family
ID=30807243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987015891U Pending JPS63124739U (enExample) | 1987-02-05 | 1987-02-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63124739U (enExample) |
-
1987
- 1987-02-05 JP JP1987015891U patent/JPS63124739U/ja active Pending