JPS6192052U - - Google Patents
Info
- Publication number
- JPS6192052U JPS6192052U JP1984176724U JP17672484U JPS6192052U JP S6192052 U JPS6192052 U JP S6192052U JP 1984176724 U JP1984176724 U JP 1984176724U JP 17672484 U JP17672484 U JP 17672484U JP S6192052 U JPS6192052 U JP S6192052U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- electrode
- movable
- semiconductor dry
- electrode plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984176724U JPS6192052U (enExample) | 1984-11-22 | 1984-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984176724U JPS6192052U (enExample) | 1984-11-22 | 1984-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6192052U true JPS6192052U (enExample) | 1986-06-14 |
Family
ID=30734317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984176724U Pending JPS6192052U (enExample) | 1984-11-22 | 1984-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6192052U (enExample) |
-
1984
- 1984-11-22 JP JP1984176724U patent/JPS6192052U/ja active Pending