JPS63157926U - - Google Patents
Info
- Publication number
- JPS63157926U JPS63157926U JP5247787U JP5247787U JPS63157926U JP S63157926 U JPS63157926 U JP S63157926U JP 5247787 U JP5247787 U JP 5247787U JP 5247787 U JP5247787 U JP 5247787U JP S63157926 U JPS63157926 U JP S63157926U
- Authority
- JP
- Japan
- Prior art keywords
- quartz chamber
- base
- internal electrode
- peripheral wall
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 3
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5247787U JPS63157926U (enExample) | 1987-04-06 | 1987-04-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5247787U JPS63157926U (enExample) | 1987-04-06 | 1987-04-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63157926U true JPS63157926U (enExample) | 1988-10-17 |
Family
ID=30877679
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5247787U Pending JPS63157926U (enExample) | 1987-04-06 | 1987-04-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63157926U (enExample) |
-
1987
- 1987-04-06 JP JP5247787U patent/JPS63157926U/ja active Pending