JPH01140823U - - Google Patents
Info
- Publication number
- JPH01140823U JPH01140823U JP3751288U JP3751288U JPH01140823U JP H01140823 U JPH01140823 U JP H01140823U JP 3751288 U JP3751288 U JP 3751288U JP 3751288 U JP3751288 U JP 3751288U JP H01140823 U JPH01140823 U JP H01140823U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- temperature
- temperature sensor
- plasma etching
- heating element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 3
- 238000001020 plasma etching Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000012544 monitoring process Methods 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3751288U JPH01140823U (enExample) | 1988-03-22 | 1988-03-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3751288U JPH01140823U (enExample) | 1988-03-22 | 1988-03-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01140823U true JPH01140823U (enExample) | 1989-09-27 |
Family
ID=31264092
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3751288U Pending JPH01140823U (enExample) | 1988-03-22 | 1988-03-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01140823U (enExample) |
-
1988
- 1988-03-22 JP JP3751288U patent/JPH01140823U/ja active Pending