JPS63134535U - - Google Patents
Info
- Publication number
- JPS63134535U JPS63134535U JP1987025704U JP2570487U JPS63134535U JP S63134535 U JPS63134535 U JP S63134535U JP 1987025704 U JP1987025704 U JP 1987025704U JP 2570487 U JP2570487 U JP 2570487U JP S63134535 U JPS63134535 U JP S63134535U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- dry etching
- heat dissipation
- dissipation sheet
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H10W72/07351—
-
- H10W72/30—
-
- H10W72/381—
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987025704U JPS63134535U (enExample) | 1987-02-25 | 1987-02-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987025704U JPS63134535U (enExample) | 1987-02-25 | 1987-02-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63134535U true JPS63134535U (enExample) | 1988-09-02 |
Family
ID=30826110
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987025704U Pending JPS63134535U (enExample) | 1987-02-25 | 1987-02-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63134535U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04356921A (ja) * | 1991-06-03 | 1992-12-10 | Fujitsu Ltd | ドライエッチング装置のウェハ保持盤 |
| JP2012159161A (ja) * | 2011-02-02 | 2012-08-23 | Orion Machinery Co Ltd | 軸受の内輪用ロックナット及び二軸回転ポンプ |
-
1987
- 1987-02-25 JP JP1987025704U patent/JPS63134535U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04356921A (ja) * | 1991-06-03 | 1992-12-10 | Fujitsu Ltd | ドライエッチング装置のウェハ保持盤 |
| JP2012159161A (ja) * | 2011-02-02 | 2012-08-23 | Orion Machinery Co Ltd | 軸受の内輪用ロックナット及び二軸回転ポンプ |