JPS61158945U - - Google Patents
Info
- Publication number
- JPS61158945U JPS61158945U JP4160585U JP4160585U JPS61158945U JP S61158945 U JPS61158945 U JP S61158945U JP 4160585 U JP4160585 U JP 4160585U JP 4160585 U JP4160585 U JP 4160585U JP S61158945 U JPS61158945 U JP S61158945U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- row
- wafers
- counterbore
- same
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims description 5
- 239000012495 reaction gas Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4160585U JPH0719137Y2 (ja) | 1985-03-25 | 1985-03-25 | エピタキシヤル成長用サセプタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4160585U JPH0719137Y2 (ja) | 1985-03-25 | 1985-03-25 | エピタキシヤル成長用サセプタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61158945U true JPS61158945U (enExample) | 1986-10-02 |
| JPH0719137Y2 JPH0719137Y2 (ja) | 1995-05-01 |
Family
ID=30551590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4160585U Expired - Lifetime JPH0719137Y2 (ja) | 1985-03-25 | 1985-03-25 | エピタキシヤル成長用サセプタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0719137Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002134484A (ja) * | 2000-10-19 | 2002-05-10 | Asm Japan Kk | 半導体基板保持装置 |
-
1985
- 1985-03-25 JP JP4160585U patent/JPH0719137Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002134484A (ja) * | 2000-10-19 | 2002-05-10 | Asm Japan Kk | 半導体基板保持装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0719137Y2 (ja) | 1995-05-01 |