JPS61137671U - - Google Patents
Info
- Publication number
- JPS61137671U JPS61137671U JP1983785U JP1983785U JPS61137671U JP S61137671 U JPS61137671 U JP S61137671U JP 1983785 U JP1983785 U JP 1983785U JP 1983785 U JP1983785 U JP 1983785U JP S61137671 U JPS61137671 U JP S61137671U
- Authority
- JP
- Japan
- Prior art keywords
- wafer boat
- heating element
- bell gear
- nozzle
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 4
- 239000000498 cooling water Substances 0.000 claims 1
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983785U JPS61137671U (enExample) | 1985-02-14 | 1985-02-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983785U JPS61137671U (enExample) | 1985-02-14 | 1985-02-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61137671U true JPS61137671U (enExample) | 1986-08-27 |
Family
ID=30509777
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1983785U Pending JPS61137671U (enExample) | 1985-02-14 | 1985-02-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61137671U (enExample) |
-
1985
- 1985-02-14 JP JP1983785U patent/JPS61137671U/ja active Pending