JPS63106757U - - Google Patents
Info
- Publication number
- JPS63106757U JPS63106757U JP1986203273U JP20327386U JPS63106757U JP S63106757 U JPS63106757 U JP S63106757U JP 1986203273 U JP1986203273 U JP 1986203273U JP 20327386 U JP20327386 U JP 20327386U JP S63106757 U JPS63106757 U JP S63106757U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum vessel
- cylinder
- gap
- reaction
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986203273U JPS63106757U (enExample) | 1986-12-27 | 1986-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986203273U JPS63106757U (enExample) | 1986-12-27 | 1986-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63106757U true JPS63106757U (enExample) | 1988-07-09 |
Family
ID=31168444
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986203273U Pending JPS63106757U (enExample) | 1986-12-27 | 1986-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63106757U (enExample) |
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1986
- 1986-12-27 JP JP1986203273U patent/JPS63106757U/ja active Pending