JPS62144058U - - Google Patents
Info
- Publication number
- JPS62144058U JPS62144058U JP3063786U JP3063786U JPS62144058U JP S62144058 U JPS62144058 U JP S62144058U JP 3063786 U JP3063786 U JP 3063786U JP 3063786 U JP3063786 U JP 3063786U JP S62144058 U JPS62144058 U JP S62144058U
- Authority
- JP
- Japan
- Prior art keywords
- disk
- wafer
- cooling
- wafer holder
- cooling plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3063786U JPS62144058U (enExample) | 1986-03-05 | 1986-03-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3063786U JPS62144058U (enExample) | 1986-03-05 | 1986-03-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62144058U true JPS62144058U (enExample) | 1987-09-11 |
Family
ID=30835631
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3063786U Pending JPS62144058U (enExample) | 1986-03-05 | 1986-03-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62144058U (enExample) |
-
1986
- 1986-03-05 JP JP3063786U patent/JPS62144058U/ja active Pending