JPS6269365U - - Google Patents
Info
- Publication number
- JPS6269365U JPS6269365U JP16075685U JP16075685U JPS6269365U JP S6269365 U JPS6269365 U JP S6269365U JP 16075685 U JP16075685 U JP 16075685U JP 16075685 U JP16075685 U JP 16075685U JP S6269365 U JPS6269365 U JP S6269365U
- Authority
- JP
- Japan
- Prior art keywords
- grooves
- disk
- ion
- ion implantation
- rotary disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16075685U JPS6269365U (enExample) | 1985-10-22 | 1985-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16075685U JPS6269365U (enExample) | 1985-10-22 | 1985-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6269365U true JPS6269365U (enExample) | 1987-05-01 |
Family
ID=31086434
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16075685U Pending JPS6269365U (enExample) | 1985-10-22 | 1985-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6269365U (enExample) |
-
1985
- 1985-10-22 JP JP16075685U patent/JPS6269365U/ja active Pending