JPS6394959U - - Google Patents
Info
- Publication number
- JPS6394959U JPS6394959U JP18704786U JP18704786U JPS6394959U JP S6394959 U JPS6394959 U JP S6394959U JP 18704786 U JP18704786 U JP 18704786U JP 18704786 U JP18704786 U JP 18704786U JP S6394959 U JPS6394959 U JP S6394959U
- Authority
- JP
- Japan
- Prior art keywords
- target
- sputtering
- hole
- protrusion
- target body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005477 sputtering target Methods 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims 2
- 210000000078 claw Anatomy 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18704786U JPS6394959U (enExample) | 1986-12-04 | 1986-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18704786U JPS6394959U (enExample) | 1986-12-04 | 1986-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6394959U true JPS6394959U (enExample) | 1988-06-18 |
Family
ID=31137164
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18704786U Pending JPS6394959U (enExample) | 1986-12-04 | 1986-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6394959U (enExample) |
-
1986
- 1986-12-04 JP JP18704786U patent/JPS6394959U/ja active Pending