JPS6269365U - - Google Patents
Info
- Publication number
- JPS6269365U JPS6269365U JP16075685U JP16075685U JPS6269365U JP S6269365 U JPS6269365 U JP S6269365U JP 16075685 U JP16075685 U JP 16075685U JP 16075685 U JP16075685 U JP 16075685U JP S6269365 U JPS6269365 U JP S6269365U
- Authority
- JP
- Japan
- Prior art keywords
- grooves
- disk
- ion
- ion implantation
- rotary disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Description
第１図は従来例の斜視図、第２図は本考案の実
施例の截断平面図、第３図は第２図の―線部
分の拡大図、第４図は第３図の―線部分の拡
大断面図、第５図及び第６図は凹溝の変形状態を
示す断面図である。
１……イオン注入室、２……イオンビーム、３
……回転デイスク、３ａ……表面、３ｂ……裏面
、６……基板、８……凹溝。
Fig. 1 is a perspective view of the conventional example, Fig. 2 is a cutaway plan view of the embodiment of the present invention, Fig. 3 is an enlarged view of the - line part in Fig. 2, and Fig. 4 is the - line part in Fig. 3. FIGS. 5 and 6 are enlarged cross-sectional views showing the deformed state of the groove. 1...Ion implantation chamber, 2...Ion beam, 3
...Rotating disk, 3a...front surface, 3b...back surface, 6...substrate, 8...concave groove.
Claims (1)
転自在に回転デイスクを設け、該デイスクに取付
けたシリコンウエハその他の基板にイオン注入処
理を施すようにしたものに於て、該回転デイスク
の表面及び裏面の夫々に、複数本の凹溝を放射状
に形成し、各表面の凹溝と裏面の凹溝は多少の肉
厚を介して平行する一対に形成して成るイオン注
入装置用回転デイスク。 In an ion implantation chamber in which an ion beam is introduced, a rotary disk is provided so as to be rotatable, and ion implantation is performed on a silicon wafer or other substrate attached to the disk. A rotary disk for an ion implanter, in which a plurality of grooves are formed radially on each disk, and the grooves on each front surface and the grooves on the back surface are formed as a pair parallel to each other with some thickness between them.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16075685U JPS6269365U (en) | 1985-10-22 | 1985-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16075685U JPS6269365U (en) | 1985-10-22 | 1985-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6269365U true JPS6269365U (en) | 1987-05-01 |
Family
ID=31086434
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16075685U Pending JPS6269365U (en) | 1985-10-22 | 1985-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6269365U (en) |
-
1985
- 1985-10-22 JP JP16075685U patent/JPS6269365U/ja active Pending