JPH0719137Y2 - エピタキシヤル成長用サセプタ - Google Patents

エピタキシヤル成長用サセプタ

Info

Publication number
JPH0719137Y2
JPH0719137Y2 JP1985041605U JP4160585U JPH0719137Y2 JP H0719137 Y2 JPH0719137 Y2 JP H0719137Y2 JP 1985041605 U JP1985041605 U JP 1985041605U JP 4160585 U JP4160585 U JP 4160585U JP H0719137 Y2 JPH0719137 Y2 JP H0719137Y2
Authority
JP
Japan
Prior art keywords
susceptor
wafer
counterbore
epitaxial growth
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985041605U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61158945U (enExample
Inventor
英治 柴田
幸二 遠目塚
Original Assignee
国際電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 国際電気株式会社 filed Critical 国際電気株式会社
Priority to JP1985041605U priority Critical patent/JPH0719137Y2/ja
Publication of JPS61158945U publication Critical patent/JPS61158945U/ja
Application granted granted Critical
Publication of JPH0719137Y2 publication Critical patent/JPH0719137Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1985041605U 1985-03-25 1985-03-25 エピタキシヤル成長用サセプタ Expired - Lifetime JPH0719137Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985041605U JPH0719137Y2 (ja) 1985-03-25 1985-03-25 エピタキシヤル成長用サセプタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985041605U JPH0719137Y2 (ja) 1985-03-25 1985-03-25 エピタキシヤル成長用サセプタ

Publications (2)

Publication Number Publication Date
JPS61158945U JPS61158945U (enExample) 1986-10-02
JPH0719137Y2 true JPH0719137Y2 (ja) 1995-05-01

Family

ID=30551590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985041605U Expired - Lifetime JPH0719137Y2 (ja) 1985-03-25 1985-03-25 エピタキシヤル成長用サセプタ

Country Status (1)

Country Link
JP (1) JPH0719137Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002134484A (ja) * 2000-10-19 2002-05-10 Asm Japan Kk 半導体基板保持装置

Also Published As

Publication number Publication date
JPS61158945U (enExample) 1986-10-02

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