JPS6430824U - - Google Patents
Info
- Publication number
- JPS6430824U JPS6430824U JP1987126865U JP12686587U JPS6430824U JP S6430824 U JPS6430824 U JP S6430824U JP 1987126865 U JP1987126865 U JP 1987126865U JP 12686587 U JP12686587 U JP 12686587U JP S6430824 U JPS6430824 U JP S6430824U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- auxiliary plate
- susceptor
- orientation flat
- sic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987126865U JPS6430824U (enExample) | 1987-08-19 | 1987-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987126865U JPS6430824U (enExample) | 1987-08-19 | 1987-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6430824U true JPS6430824U (enExample) | 1989-02-27 |
Family
ID=31378773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987126865U Pending JPS6430824U (enExample) | 1987-08-19 | 1987-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6430824U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0794416A (ja) * | 1993-09-21 | 1995-04-07 | Nec Corp | 化学気相成長装置 |
| JP2011192731A (ja) * | 2010-03-12 | 2011-09-29 | Taiyo Nippon Sanso Corp | 気相成長装置 |
-
1987
- 1987-08-19 JP JP1987126865U patent/JPS6430824U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0794416A (ja) * | 1993-09-21 | 1995-04-07 | Nec Corp | 化学気相成長装置 |
| JP2011192731A (ja) * | 2010-03-12 | 2011-09-29 | Taiyo Nippon Sanso Corp | 気相成長装置 |