JPS6273534U - - Google Patents
Info
- Publication number
- JPS6273534U JPS6273534U JP1985163925U JP16392585U JPS6273534U JP S6273534 U JPS6273534 U JP S6273534U JP 1985163925 U JP1985163925 U JP 1985163925U JP 16392585 U JP16392585 U JP 16392585U JP S6273534 U JPS6273534 U JP S6273534U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- segments
- semiconductor substrate
- utility
- combination
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985163925U JPS6273534U (enExample) | 1985-10-25 | 1985-10-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985163925U JPS6273534U (enExample) | 1985-10-25 | 1985-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6273534U true JPS6273534U (enExample) | 1987-05-11 |
Family
ID=31092573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985163925U Pending JPS6273534U (enExample) | 1985-10-25 | 1985-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6273534U (enExample) |
-
1985
- 1985-10-25 JP JP1985163925U patent/JPS6273534U/ja active Pending