JPS6380842U - - Google Patents
Info
- Publication number
- JPS6380842U JPS6380842U JP17581186U JP17581186U JPS6380842U JP S6380842 U JPS6380842 U JP S6380842U JP 17581186 U JP17581186 U JP 17581186U JP 17581186 U JP17581186 U JP 17581186U JP S6380842 U JPS6380842 U JP S6380842U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- board
- holding jig
- holding
- window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims 1
- 238000002109 crystal growth method Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17581186U JPS6380842U (enExample) | 1986-11-15 | 1986-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17581186U JPS6380842U (enExample) | 1986-11-15 | 1986-11-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6380842U true JPS6380842U (enExample) | 1988-05-27 |
Family
ID=31115477
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17581186U Pending JPS6380842U (enExample) | 1986-11-15 | 1986-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6380842U (enExample) |
-
1986
- 1986-11-15 JP JP17581186U patent/JPS6380842U/ja active Pending