JPS61106026U - - Google Patents
Info
- Publication number
- JPS61106026U JPS61106026U JP19107084U JP19107084U JPS61106026U JP S61106026 U JPS61106026 U JP S61106026U JP 19107084 U JP19107084 U JP 19107084U JP 19107084 U JP19107084 U JP 19107084U JP S61106026 U JPS61106026 U JP S61106026U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- jig
- heat treatment
- guide groove
- treatment jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19107084U JPS61106026U (enExample) | 1984-12-17 | 1984-12-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19107084U JPS61106026U (enExample) | 1984-12-17 | 1984-12-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61106026U true JPS61106026U (enExample) | 1986-07-05 |
Family
ID=30748512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19107084U Pending JPS61106026U (enExample) | 1984-12-17 | 1984-12-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61106026U (enExample) |
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1984
- 1984-12-17 JP JP19107084U patent/JPS61106026U/ja active Pending