JPS61106026U - - Google Patents
Info
- Publication number
- JPS61106026U JPS61106026U JP19107084U JP19107084U JPS61106026U JP S61106026 U JPS61106026 U JP S61106026U JP 19107084 U JP19107084 U JP 19107084U JP 19107084 U JP19107084 U JP 19107084U JP S61106026 U JPS61106026 U JP S61106026U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- jig
- heat treatment
- guide groove
- treatment jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
Description
第１図ａないし第１図ｃは本考案を適用したウ
エハ熱処理治具の一実施例を示すものであり、第
１図ａは平面図、第１図ｂは側面図、第１図ｃは
正面図である。第２図は第１図ａのＡ―Ａ線にお
ける断面図である。第３図は本考案の他の実施例
を示す正面図である。
１…ウエハ熱処理治具、２…ウエハ支持棒、３
…ウエハ案内溝、４…連結板、７…ウエハ、１１
…第１の薄板（底面）、１２…第２の薄板（後端
）、１３…第３の薄板（前端）。
Figures 1a to 1c show an embodiment of a wafer heat treatment jig to which the present invention is applied, in which Figure 1a is a plan view, Figure 1b is a side view, and Figure 1c is a side view. It is a front view. FIG. 2 is a sectional view taken along line AA in FIG. 1a. FIG. 3 is a front view showing another embodiment of the present invention. 1... Wafer heat treatment jig, 2... Wafer support rod, 3
...Wafer guide groove, 4...Connecting plate, 7...Wafer, 11
...First thin plate (bottom surface), 12... Second thin plate (rear end), 13... Third thin plate (front end).
Claims (1)
ハを熱処理する際に上記ウエハ案内溝にウエハを
立てた状態で支持する治具であつて、この治具の
底面と少なくとも治具の挿入方向の前端及び後端
に薄板を設けてなるウエハ熱処理治具。 A jig that is equipped with a support rod in which a wafer guide groove is drilled, and that supports the wafer in an upright position in the wafer guide groove when heat-treating the wafer, the bottom surface of the jig and at least the insertion direction of the jig. A wafer heat treatment jig with thin plates installed at the front and rear ends of the wafer heat treatment jig.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19107084U JPS61106026U (en) | 1984-12-17 | 1984-12-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19107084U JPS61106026U (en) | 1984-12-17 | 1984-12-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61106026U true JPS61106026U (en) | 1986-07-05 |
Family
ID=30748512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19107084U Pending JPS61106026U (en) | 1984-12-17 | 1984-12-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61106026U (en) |
-
1984
- 1984-12-17 JP JP19107084U patent/JPS61106026U/ja active Pending
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