JPS63174435U - - Google Patents

Info

Publication number
JPS63174435U
JPS63174435U JP15796486U JP15796486U JPS63174435U JP S63174435 U JPS63174435 U JP S63174435U JP 15796486 U JP15796486 U JP 15796486U JP 15796486 U JP15796486 U JP 15796486U JP S63174435 U JPS63174435 U JP S63174435U
Authority
JP
Japan
Prior art keywords
susceptor
semiconductor wafer
gas
pedestal
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15796486U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0614475Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15796486U priority Critical patent/JPH0614475Y2/ja
Publication of JPS63174435U publication Critical patent/JPS63174435U/ja
Application granted granted Critical
Publication of JPH0614475Y2 publication Critical patent/JPH0614475Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP15796486U 1986-10-14 1986-10-14 半導体製造装置 Expired - Lifetime JPH0614475Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15796486U JPH0614475Y2 (ja) 1986-10-14 1986-10-14 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15796486U JPH0614475Y2 (ja) 1986-10-14 1986-10-14 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS63174435U true JPS63174435U (enExample) 1988-11-11
JPH0614475Y2 JPH0614475Y2 (ja) 1994-04-13

Family

ID=31081004

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15796486U Expired - Lifetime JPH0614475Y2 (ja) 1986-10-14 1986-10-14 半導体製造装置

Country Status (1)

Country Link
JP (1) JPH0614475Y2 (enExample)

Also Published As

Publication number Publication date
JPH0614475Y2 (ja) 1994-04-13

Similar Documents

Publication Publication Date Title
JPS6312128A (ja) バレル型気相成長装置
US4651674A (en) Apparatus for vapor deposition
JPS63174435U (enExample)
JPS63196033A (ja) 気相成長装置
JPH0227715A (ja) 気相成長装置用加熱ステージ
JPH0864544A (ja) 気相成長方法
JPS5626437A (en) Wafer supporting base
JPS6397230U (enExample)
JPH01140816U (enExample)
JPS61144633U (enExample)
JPS58158438U (ja) エピタキシヤル成長装置のコイル保持装置
JPH0339835U (enExample)
JPH0339833U (enExample)
JPS6324826U (enExample)
JPS58158439U (ja) エピタキシヤル成長装置のコイル支え装置
JPH0322912Y2 (enExample)
JPS61281527A (ja) 半導体ウエハ加熱処理装置
JPS6274330U (enExample)
JPH0456799B2 (enExample)
JPH02101528U (enExample)
JPS6219731U (enExample)
JPS63127121U (enExample)
JPS62136566U (enExample)
JPS6198876U (enExample)
JPH0345956U (enExample)