JPS6416633U - - Google Patents
Info
- Publication number
- JPS6416633U JPS6416633U JP1987112530U JP11253087U JPS6416633U JP S6416633 U JPS6416633 U JP S6416633U JP 1987112530 U JP1987112530 U JP 1987112530U JP 11253087 U JP11253087 U JP 11253087U JP S6416633 U JPS6416633 U JP S6416633U
- Authority
- JP
- Japan
- Prior art keywords
- head
- thin film
- cvd
- substrate
- transport means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987112530U JPS6416633U (enExample) | 1987-07-21 | 1987-07-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987112530U JPS6416633U (enExample) | 1987-07-21 | 1987-07-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6416633U true JPS6416633U (enExample) | 1989-01-27 |
Family
ID=31351551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987112530U Pending JPS6416633U (enExample) | 1987-07-21 | 1987-07-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6416633U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03157928A (ja) * | 1989-11-15 | 1991-07-05 | Mitsubishi Electric Corp | 薄膜形成装置 |
-
1987
- 1987-07-21 JP JP1987112530U patent/JPS6416633U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03157928A (ja) * | 1989-11-15 | 1991-07-05 | Mitsubishi Electric Corp | 薄膜形成装置 |