JPS62182541U - - Google Patents
Info
- Publication number
- JPS62182541U JPS62182541U JP1986070532U JP7053286U JPS62182541U JP S62182541 U JPS62182541 U JP S62182541U JP 1986070532 U JP1986070532 U JP 1986070532U JP 7053286 U JP7053286 U JP 7053286U JP S62182541 U JPS62182541 U JP S62182541U
- Authority
- JP
- Japan
- Prior art keywords
- support substrate
- plate
- semiconductor manufacturing
- susceptor plate
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986070532U JPS62182541U (enExample) | 1986-05-10 | 1986-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986070532U JPS62182541U (enExample) | 1986-05-10 | 1986-05-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62182541U true JPS62182541U (enExample) | 1987-11-19 |
Family
ID=30912256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986070532U Pending JPS62182541U (enExample) | 1986-05-10 | 1986-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62182541U (enExample) |
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1986
- 1986-05-10 JP JP1986070532U patent/JPS62182541U/ja active Pending