JPS6221528U - - Google Patents

Info

Publication number
JPS6221528U
JPS6221528U JP1985112666U JP11266685U JPS6221528U JP S6221528 U JPS6221528 U JP S6221528U JP 1985112666 U JP1985112666 U JP 1985112666U JP 11266685 U JP11266685 U JP 11266685U JP S6221528 U JPS6221528 U JP S6221528U
Authority
JP
Japan
Prior art keywords
reaction chamber
induction heating
frequency induction
susceptor
heating coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985112666U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985112666U priority Critical patent/JPS6221528U/ja
Publication of JPS6221528U publication Critical patent/JPS6221528U/ja
Pending legal-status Critical Current

Links

JP1985112666U 1985-07-23 1985-07-23 Pending JPS6221528U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985112666U JPS6221528U (enExample) 1985-07-23 1985-07-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985112666U JPS6221528U (enExample) 1985-07-23 1985-07-23

Publications (1)

Publication Number Publication Date
JPS6221528U true JPS6221528U (enExample) 1987-02-09

Family

ID=30993751

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985112666U Pending JPS6221528U (enExample) 1985-07-23 1985-07-23

Country Status (1)

Country Link
JP (1) JPS6221528U (enExample)

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