JPH0351111B2 - - Google Patents
Info
- Publication number
- JPH0351111B2 JPH0351111B2 JP58165889A JP16588983A JPH0351111B2 JP H0351111 B2 JPH0351111 B2 JP H0351111B2 JP 58165889 A JP58165889 A JP 58165889A JP 16588983 A JP16588983 A JP 16588983A JP H0351111 B2 JPH0351111 B2 JP H0351111B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- melting point
- point metal
- high melting
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58165889A JPS6058659A (ja) | 1983-09-10 | 1983-09-10 | 半導体記憶装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58165889A JPS6058659A (ja) | 1983-09-10 | 1983-09-10 | 半導体記憶装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6058659A JPS6058659A (ja) | 1985-04-04 |
| JPH0351111B2 true JPH0351111B2 (https=) | 1991-08-05 |
Family
ID=15820895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58165889A Granted JPS6058659A (ja) | 1983-09-10 | 1983-09-10 | 半導体記憶装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6058659A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63209653A (ja) * | 1987-02-27 | 1988-08-31 | ノバ テクノロジ−ズ インコ−ポレイテツド | リクライニング可能な車椅子装置 |
-
1983
- 1983-09-10 JP JP58165889A patent/JPS6058659A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6058659A (ja) | 1985-04-04 |
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