JPH0349363B2 - - Google Patents

Info

Publication number
JPH0349363B2
JPH0349363B2 JP60144434A JP14443485A JPH0349363B2 JP H0349363 B2 JPH0349363 B2 JP H0349363B2 JP 60144434 A JP60144434 A JP 60144434A JP 14443485 A JP14443485 A JP 14443485A JP H0349363 B2 JPH0349363 B2 JP H0349363B2
Authority
JP
Japan
Prior art keywords
sample
normal
electron beam
detectors
standard
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60144434A
Other languages
English (en)
Japanese (ja)
Other versions
JPS626112A (ja
Inventor
Hisayoshi Sato
Masataka Oohori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Tokyo NUC
Original Assignee
University of Tokyo NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Tokyo NUC filed Critical University of Tokyo NUC
Priority to JP14443485A priority Critical patent/JPS626112A/ja
Publication of JPS626112A publication Critical patent/JPS626112A/ja
Publication of JPH0349363B2 publication Critical patent/JPH0349363B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP14443485A 1985-07-03 1985-07-03 表面形状測定方法 Granted JPS626112A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14443485A JPS626112A (ja) 1985-07-03 1985-07-03 表面形状測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14443485A JPS626112A (ja) 1985-07-03 1985-07-03 表面形状測定方法

Publications (2)

Publication Number Publication Date
JPS626112A JPS626112A (ja) 1987-01-13
JPH0349363B2 true JPH0349363B2 (enrdf_load_stackoverflow) 1991-07-29

Family

ID=15362111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14443485A Granted JPS626112A (ja) 1985-07-03 1985-07-03 表面形状測定方法

Country Status (1)

Country Link
JP (1) JPS626112A (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63215910A (ja) * 1987-03-04 1988-09-08 Erionikusu:Kk 断面測定方法
JPS63277911A (ja) * 1987-03-04 1988-11-15 Erionikusu:Kk 断面測定方法
JPS63215907A (ja) * 1987-03-04 1988-09-08 Erionikusu:Kk 断面測定装置
JPS63215909A (ja) * 1987-03-04 1988-09-08 Erionikusu:Kk 断面測定方法
JPS63215908A (ja) * 1987-03-04 1988-09-08 Erionikusu:Kk 断面測定方法
US4912313A (en) * 1987-11-27 1990-03-27 Hitachi Ltd. Method of measuring surface topography by using scanning electron microscope, and apparatus therefor
JP2786207B2 (ja) * 1988-08-26 1998-08-13 株式会社日立製作所 走査型顕微鏡における表面形状算出方法
JP4936985B2 (ja) 2007-05-14 2012-05-23 株式会社日立ハイテクノロジーズ 走査電子顕微鏡およびそれを用いた三次元形状測定装置
JP6573736B1 (ja) * 2019-02-28 2019-09-11 株式会社堀場製作所 三次元画像生成装置、及び三次元画像生成装置の係数算出方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58225306A (ja) * 1982-06-24 1983-12-27 Jeol Ltd 電子線照射による試料表面の幾何学的情報の記録又は表示方法

Also Published As

Publication number Publication date
JPS626112A (ja) 1987-01-13

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