JPS626112A - 表面形状測定方法 - Google Patents

表面形状測定方法

Info

Publication number
JPS626112A
JPS626112A JP14443485A JP14443485A JPS626112A JP S626112 A JPS626112 A JP S626112A JP 14443485 A JP14443485 A JP 14443485A JP 14443485 A JP14443485 A JP 14443485A JP S626112 A JPS626112 A JP S626112A
Authority
JP
Japan
Prior art keywords
sample
normal
standard
determined
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14443485A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0349363B2 (enrdf_load_stackoverflow
Inventor
Hisayoshi Sato
壽芳 佐藤
Masataka Ohori
大堀　眞敬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Tokyo NUC
Original Assignee
University of Tokyo NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Tokyo NUC filed Critical University of Tokyo NUC
Priority to JP14443485A priority Critical patent/JPS626112A/ja
Publication of JPS626112A publication Critical patent/JPS626112A/ja
Publication of JPH0349363B2 publication Critical patent/JPH0349363B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP14443485A 1985-07-03 1985-07-03 表面形状測定方法 Granted JPS626112A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14443485A JPS626112A (ja) 1985-07-03 1985-07-03 表面形状測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14443485A JPS626112A (ja) 1985-07-03 1985-07-03 表面形状測定方法

Publications (2)

Publication Number Publication Date
JPS626112A true JPS626112A (ja) 1987-01-13
JPH0349363B2 JPH0349363B2 (enrdf_load_stackoverflow) 1991-07-29

Family

ID=15362111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14443485A Granted JPS626112A (ja) 1985-07-03 1985-07-03 表面形状測定方法

Country Status (1)

Country Link
JP (1) JPS626112A (enrdf_load_stackoverflow)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63215907A (ja) * 1987-03-04 1988-09-08 Erionikusu:Kk 断面測定装置
JPS63215910A (ja) * 1987-03-04 1988-09-08 Erionikusu:Kk 断面測定方法
JPS63215908A (ja) * 1987-03-04 1988-09-08 Erionikusu:Kk 断面測定方法
JPS63215909A (ja) * 1987-03-04 1988-09-08 Erionikusu:Kk 断面測定方法
JPS63277911A (ja) * 1987-03-04 1988-11-15 Erionikusu:Kk 断面測定方法
US4912313A (en) * 1987-11-27 1990-03-27 Hitachi Ltd. Method of measuring surface topography by using scanning electron microscope, and apparatus therefor
US5001344A (en) * 1988-08-26 1991-03-19 Hitachi, Ltd. Scanning electron microscope and method of processing the same
JP2008282761A (ja) * 2007-05-14 2008-11-20 Hitachi High-Technologies Corp 走査電子顕微鏡およびそれを用いた三次元形状測定装置
JP2020139829A (ja) * 2019-02-28 2020-09-03 株式会社堀場製作所 三次元画像生成装置、及び三次元画像生成装置の係数算出方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58225306A (ja) * 1982-06-24 1983-12-27 Jeol Ltd 電子線照射による試料表面の幾何学的情報の記録又は表示方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58225306A (ja) * 1982-06-24 1983-12-27 Jeol Ltd 電子線照射による試料表面の幾何学的情報の記録又は表示方法

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63215907A (ja) * 1987-03-04 1988-09-08 Erionikusu:Kk 断面測定装置
JPS63215910A (ja) * 1987-03-04 1988-09-08 Erionikusu:Kk 断面測定方法
JPS63215908A (ja) * 1987-03-04 1988-09-08 Erionikusu:Kk 断面測定方法
JPS63215909A (ja) * 1987-03-04 1988-09-08 Erionikusu:Kk 断面測定方法
JPS63277911A (ja) * 1987-03-04 1988-11-15 Erionikusu:Kk 断面測定方法
US4912313A (en) * 1987-11-27 1990-03-27 Hitachi Ltd. Method of measuring surface topography by using scanning electron microscope, and apparatus therefor
US5001344A (en) * 1988-08-26 1991-03-19 Hitachi, Ltd. Scanning electron microscope and method of processing the same
JP2008282761A (ja) * 2007-05-14 2008-11-20 Hitachi High-Technologies Corp 走査電子顕微鏡およびそれを用いた三次元形状測定装置
US7705304B2 (en) 2007-05-14 2010-04-27 Hitachi High-Technologies Corporation Scanning electron microscope and three-dimensional shape measuring device that used it
JP2020139829A (ja) * 2019-02-28 2020-09-03 株式会社堀場製作所 三次元画像生成装置、及び三次元画像生成装置の係数算出方法

Also Published As

Publication number Publication date
JPH0349363B2 (enrdf_load_stackoverflow) 1991-07-29

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