JPH0347727B2 - - Google Patents
Info
- Publication number
- JPH0347727B2 JPH0347727B2 JP63063921A JP6392188A JPH0347727B2 JP H0347727 B2 JPH0347727 B2 JP H0347727B2 JP 63063921 A JP63063921 A JP 63063921A JP 6392188 A JP6392188 A JP 6392188A JP H0347727 B2 JPH0347727 B2 JP H0347727B2
- Authority
- JP
- Japan
- Prior art keywords
- alignment mark
- image
- detection
- linear sensor
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 48
- 230000003287 optical effect Effects 0.000 claims description 24
- 230000004075 alteration Effects 0.000 claims description 15
- 238000000034 method Methods 0.000 description 17
- 238000012545 processing Methods 0.000 description 12
- 238000007792 addition Methods 0.000 description 8
- 230000007423 decrease Effects 0.000 description 8
- 230000001360 synchronised effect Effects 0.000 description 8
- 238000003384 imaging method Methods 0.000 description 7
- 230000004044 response Effects 0.000 description 7
- 238000012546 transfer Methods 0.000 description 7
- 230000004043 responsiveness Effects 0.000 description 6
- 238000004364 calculation method Methods 0.000 description 5
- 230000006835 compression Effects 0.000 description 5
- 238000007906 compression Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000004888 barrier function Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000013139 quantization Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
Landscapes
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63063921A JPH01235335A (ja) | 1988-03-16 | 1988-03-16 | アライメントマークの位置検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63063921A JPH01235335A (ja) | 1988-03-16 | 1988-03-16 | アライメントマークの位置検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01235335A JPH01235335A (ja) | 1989-09-20 |
| JPH0347727B2 true JPH0347727B2 (enrdf_load_stackoverflow) | 1991-07-22 |
Family
ID=13243287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63063921A Granted JPH01235335A (ja) | 1988-03-16 | 1988-03-16 | アライメントマークの位置検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01235335A (enrdf_load_stackoverflow) |
-
1988
- 1988-03-16 JP JP63063921A patent/JPH01235335A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01235335A (ja) | 1989-09-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |