JPH033926B2 - - Google Patents

Info

Publication number
JPH033926B2
JPH033926B2 JP57138627A JP13862782A JPH033926B2 JP H033926 B2 JPH033926 B2 JP H033926B2 JP 57138627 A JP57138627 A JP 57138627A JP 13862782 A JP13862782 A JP 13862782A JP H033926 B2 JPH033926 B2 JP H033926B2
Authority
JP
Japan
Prior art keywords
thin film
magnetic
forming
vacuum chamber
insulating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57138627A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5929410A (ja
Inventor
Toshihiro Yoshida
Masahide Suenaga
Masayuki Takagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Computer Basic Technology Research Association Corp
Original Assignee
Computer Basic Technology Research Association Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Computer Basic Technology Research Association Corp filed Critical Computer Basic Technology Research Association Corp
Priority to JP13862782A priority Critical patent/JPS5929410A/ja
Publication of JPS5929410A publication Critical patent/JPS5929410A/ja
Publication of JPH033926B2 publication Critical patent/JPH033926B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)
  • Thin Magnetic Films (AREA)
JP13862782A 1982-08-11 1982-08-11 磁性薄膜の形成方法 Granted JPS5929410A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13862782A JPS5929410A (ja) 1982-08-11 1982-08-11 磁性薄膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13862782A JPS5929410A (ja) 1982-08-11 1982-08-11 磁性薄膜の形成方法

Publications (2)

Publication Number Publication Date
JPS5929410A JPS5929410A (ja) 1984-02-16
JPH033926B2 true JPH033926B2 (enrdf_load_stackoverflow) 1991-01-21

Family

ID=15226475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13862782A Granted JPS5929410A (ja) 1982-08-11 1982-08-11 磁性薄膜の形成方法

Country Status (1)

Country Link
JP (1) JPS5929410A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5929410A (ja) 1984-02-16

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