JPH0554166B2 - - Google Patents
Info
- Publication number
- JPH0554166B2 JPH0554166B2 JP11756887A JP11756887A JPH0554166B2 JP H0554166 B2 JPH0554166 B2 JP H0554166B2 JP 11756887 A JP11756887 A JP 11756887A JP 11756887 A JP11756887 A JP 11756887A JP H0554166 B2 JPH0554166 B2 JP H0554166B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- soft magnetic
- thickness
- forming
- alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000956 alloy Substances 0.000 claims description 27
- 239000000758 substrate Substances 0.000 claims description 26
- 229910045601 alloy Inorganic materials 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 21
- 229910002796 Si–Al Inorganic materials 0.000 claims description 19
- 238000010438 heat treatment Methods 0.000 claims description 18
- 239000011162 core material Substances 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000010408 film Substances 0.000 description 84
- 230000035882 stress Effects 0.000 description 30
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000035699 permeability Effects 0.000 description 5
- 230000006378 damage Effects 0.000 description 4
- 239000000696 magnetic material Substances 0.000 description 4
- 229910000838 Al alloy Inorganic materials 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000005501 phase interface Effects 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910017082 Fe-Si Inorganic materials 0.000 description 1
- 229910017133 Fe—Si Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11756887A JPS63281204A (ja) | 1987-05-13 | 1987-05-13 | 磁気ヘッドコア材料の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11756887A JPS63281204A (ja) | 1987-05-13 | 1987-05-13 | 磁気ヘッドコア材料の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63281204A JPS63281204A (ja) | 1988-11-17 |
| JPH0554166B2 true JPH0554166B2 (enrdf_load_stackoverflow) | 1993-08-11 |
Family
ID=14715038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11756887A Granted JPS63281204A (ja) | 1987-05-13 | 1987-05-13 | 磁気ヘッドコア材料の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63281204A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5419969A (en) * | 1990-07-05 | 1995-05-30 | Asahi Glass Company Ltd. | Low emissivity film |
| US5532062A (en) * | 1990-07-05 | 1996-07-02 | Asahi Glass Company Ltd. | Low emissivity film |
| EP0464789B1 (en) | 1990-07-05 | 1996-10-09 | Asahi Glass Company Ltd. | A low emissivity film |
-
1987
- 1987-05-13 JP JP11756887A patent/JPS63281204A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63281204A (ja) | 1988-11-17 |
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