JPH0338585Y2 - - Google Patents
Info
- Publication number
- JPH0338585Y2 JPH0338585Y2 JP1986104280U JP10428086U JPH0338585Y2 JP H0338585 Y2 JPH0338585 Y2 JP H0338585Y2 JP 1986104280 U JP1986104280 U JP 1986104280U JP 10428086 U JP10428086 U JP 10428086U JP H0338585 Y2 JPH0338585 Y2 JP H0338585Y2
- Authority
- JP
- Japan
- Prior art keywords
- tunnel
- space
- air
- workpiece
- transport vehicle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000000428 dust Substances 0.000 description 8
- 230000003749 cleanliness Effects 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986104280U JPH0338585Y2 (it) | 1986-07-09 | 1986-07-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986104280U JPH0338585Y2 (it) | 1986-07-09 | 1986-07-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6310336U JPS6310336U (it) | 1988-01-23 |
| JPH0338585Y2 true JPH0338585Y2 (it) | 1991-08-14 |
Family
ID=30977627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986104280U Expired JPH0338585Y2 (it) | 1986-07-09 | 1986-07-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0338585Y2 (it) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60140841U (ja) * | 1984-02-29 | 1985-09-18 | 株式会社椿本チエイン | 物品搬送装置を収納した空気清浄室内の塵埃除去装置 |
-
1986
- 1986-07-09 JP JP1986104280U patent/JPH0338585Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6310336U (it) | 1988-01-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0338585Y2 (it) | ||
| JP4715383B2 (ja) | 搬送台車 | |
| JP2009206245A (ja) | 走行輪発塵防止装置及び走行輪発塵防止方法 | |
| JP3861534B2 (ja) | クリーンルーム用無人搬送車 | |
| JPH0224016Y2 (it) | ||
| JP2000271552A (ja) | 天井走行式搬送台車における走行路内清掃装置 | |
| JP3226017B2 (ja) | クリーンユニットを搭載した天井走行車 | |
| JPH03172221A (ja) | クリーン搬送装置 | |
| JPH04164708A (ja) | 空気浮上式搬送装置 | |
| JPS6311268U (it) | ||
| JPS63304640A (ja) | クリ−ンル−ム内搬送装置 | |
| JP4067703B2 (ja) | 搬送台車 | |
| JPS6027138Y2 (ja) | 荷搬送設備用清掃装置 | |
| JP2501262Y2 (ja) | オ―バ―ヘッド型物品搬送装置 | |
| JP2002154782A (ja) | 天井走行式ワーク搬送車 | |
| JPH03208764A (ja) | クリーンルーム内のワーク搬送装置 | |
| JP2001031211A (ja) | 搬送システム | |
| JP2555685Y2 (ja) | クリーンルーム内の物品保管設備 | |
| JPH031334Y2 (it) | ||
| JPH0735209B2 (ja) | クリ−ンル−ム等における被加工物の搬送方法および搬送装置 | |
| JPH04169414A (ja) | 荷搬送設備 | |
| JPS6221623A (ja) | 搬送装置 | |
| JPS62116349A (ja) | 搬送装置 | |
| JPS5939104Y2 (ja) | 荷搬送設備 | |
| JPH032484Y2 (it) |