JPH0224016Y2 - - Google Patents
Info
- Publication number
- JPH0224016Y2 JPH0224016Y2 JP1984027151U JP2715184U JPH0224016Y2 JP H0224016 Y2 JPH0224016 Y2 JP H0224016Y2 JP 1984027151 U JP1984027151 U JP 1984027151U JP 2715184 U JP2715184 U JP 2715184U JP H0224016 Y2 JPH0224016 Y2 JP H0224016Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- purification chamber
- duct
- dust
- air purification
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000428 dust Substances 0.000 claims description 23
- 238000004887 air purification Methods 0.000 claims description 10
- 238000004140 cleaning Methods 0.000 description 13
- 238000005299 abrasion Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Prevention Of Fouling (AREA)
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2715184U JPS60140841U (ja) | 1984-02-29 | 1984-02-29 | 物品搬送装置を収納した空気清浄室内の塵埃除去装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2715184U JPS60140841U (ja) | 1984-02-29 | 1984-02-29 | 物品搬送装置を収納した空気清浄室内の塵埃除去装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60140841U JPS60140841U (ja) | 1985-09-18 |
JPH0224016Y2 true JPH0224016Y2 (it) | 1990-07-02 |
Family
ID=30523827
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2715184U Granted JPS60140841U (ja) | 1984-02-29 | 1984-02-29 | 物品搬送装置を収納した空気清浄室内の塵埃除去装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60140841U (it) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0248016Y2 (it) * | 1984-12-21 | 1990-12-17 | ||
JPS62172126A (ja) * | 1986-01-25 | 1987-07-29 | Teru Saamuko Kk | 清浄化装置 |
JPH0338585Y2 (it) * | 1986-07-09 | 1991-08-14 | ||
JP5290663B2 (ja) * | 2008-08-26 | 2013-09-18 | 日本無機株式会社 | 空気浄化装置及び空気浄化装置のフィルタ交換方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5047443A (it) * | 1972-11-24 | 1975-04-26 | ||
JPS555878U (it) * | 1978-06-29 | 1980-01-16 | ||
JPS5587650A (en) * | 1978-12-26 | 1980-07-02 | Tokyo Shibaura Electric Co | Conveyor |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5546451Y2 (it) * | 1977-09-30 | 1980-10-30 |
-
1984
- 1984-02-29 JP JP2715184U patent/JPS60140841U/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5047443A (it) * | 1972-11-24 | 1975-04-26 | ||
JPS555878U (it) * | 1978-06-29 | 1980-01-16 | ||
JPS5587650A (en) * | 1978-12-26 | 1980-07-02 | Tokyo Shibaura Electric Co | Conveyor |
Also Published As
Publication number | Publication date |
---|---|
JPS60140841U (ja) | 1985-09-18 |
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